Download (Manuals):

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TWR 2000T Microwave Radical Generator (left) and Power Supply (right)

Characteristics of the TWR - Series (maximum output power 850 W - 3000 W):

1. Compact Design
2. High efficiency and plasma density
3. No ion leakage from the plasma chamber
4. Water cooled plasma chamber
5. Easy interfacing to any equipment
6. Simple, fast, and inexpensive maintenance
7 Free of any tuning after maintenance, parts
    replacement, and process modification
8. “Ultra clean”
9. TÜV certified

Specifications overview:

Power Supply Input:

Power Supply Input:


Magnetron output:
Cooling:


Operation:

Dimensions:


 

3 x 480V or 3 x 400V, 3 x 8A, 50/60Hz
3500V, 1.45A, 50-500Hz
3000W con, 6000W peak with matched load
2.450GHz +/- 10MHz, 2000W
MW-Power supply: air cooled
Microwave Radical Generator: water cooled, min. 3 litre / min
external via PLC-Interface or manually via front panel
Power Supply: plug-in case 19’’, 4 Height Units, 460mm depth Microwave Radical Generator: 350mm x 360mm x 130mm

Further products:

STP 2020



SAN 1010

 

Stripping tool for thick and barely removable resists like SU-8
see STP 2020 Datasheet

Thin Wafer Silicon Etcher
see SAN 1010 Datasheet