About R3T

Rapid Reactive Radicals Technology GmbH (R3T) is a leading supplier of Remote Plasma Microwave Radical Generators for semiconductor manufacturing equipment.
R3T develops and supplies outstanding compact designed sources for generation of highly reactive radicals used for dry chemical processes.

Established in Munich, Germany since 1998, R3T continues to concentrate on highest quality and reliability of its core technology and products to develop and maintain its leadership in the field of Remote Plasma Microwave Radical Generators. Essentially use of R3T’s Radical Generators is the high end semiconductor technology.

Since 2005 R3T is offering his products beyond the Semiconductor market, especially in the significantly expanding markets as Solar Technology and MEMS. Furthermore R3T is focusing on the high quality watch making industry.

R3T’s technical expertise is based on the founders’ cumulative experience in the semiconductor industry and long term know how in microwave radical generator design.
In 2007 a close co-operation between MUEGGE ELECTRONIC and R3T was launched which has resulted in a significant improvement of R3T’s manufacturing capacity and reliability and enables both parties to offer a broad spectrum of products in the fields of plasma and microwave technology.

Since the end of 2008 MUEGGE ELECTRONIC is member of the Roth & Rau group.
Roth & Rau is one of the world’s leading suppliers of plasma process systems for photovoltaics industry.